Thin film interference data processing

First, record the key variables , Absolute_phases Is the absolute phase difference ( Is the phase difference between the last picture and the next picture ),min_xiangweicha Is the minimum absolute phase difference ,sum_total_xiangweicha Is the sum of the minimum phase differences ( Calculate linearity ). Data processing is divided into two processes: whether there are cross stripes or not , The first is when there are no cross stripes

Place the minimum absolute phase difference at A Column , The sum of the minimum phase difference is placed in B Column , Color confocal data is placed on C Column , use B,C Column fit out a straight line （ Thin film interference measurement point and color confocal measurement point If collinear The most direct response is to produce a very linear fitting line ）

The fitting equation of the straight line is obtained from the graph , then B Plug in X in , Generated Y As D Column ,D The column data is the surface topography error obtained by thin film interference . Finally, color confocal data (C) Subtract the measured data from the film interference (D) It is the final morphology data of flat crystal (E), The final shape data is combined with the displacement table data to obtain the shape map , As shown in the figure ：